Materials Science Of Thin Films. Deposition And Structure, Second Edition

This new edition of the author's well-received Tee Materials Science of Thin Films is thoroughly revised, and fully up-to-date. Written in a fluent tutorial manner, this book * Contains extensive tables, figures, and recent references related to thin film science and technology * Treats both physical and chemical vapor deposition of thin films * Emphasizes the growing importance of plasma and ion beam processing * Traces thin film formation from nucleation to the final grain structure and morphology * Discusses aspects of epitaxy and their implications for compound semiconductor films and optoelectronic devices * Describes the rotes of solid-state mass transport and stress in thin-film phenomena * Presents recent advances in measurement of film thickness and characterization of surface structure and composition * Has a complete set of exercises to aid student learning As a result, readers will better understand the primary research and technical literature in the field and more intelligently select and optimize film deposition and treatment processes.